Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879053 | Temperature controlled substrate support assembly | Anthony J. Ricci | 2020-12-29 |
| 10832979 | Feedback control system for iterative etch process | Arthur M. Howald, John C. Valcore, Jr. | 2020-11-10 |