Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10853444 | Systems and methods for tuning an impedance matching network in a step-wise fashion | Arthur M. Howald, Andrew Fong, David Hopkins | 2020-12-01 |
| 10832979 | Feedback control system for iterative etch process | Arthur M. Howald, Henry Povolny | 2020-11-10 |
| 10762266 | Segmenting a model within a plasma system | Arthur M. Howald | 2020-09-01 |
| 10748748 | RF impedance model based fault detection | James Rogers, Nicholas Webb, Peter Muraoka | 2020-08-18 |
| 10707056 | Using modeling to determine ion energy associated with a plasma system | Bradford J. Lyndaker | 2020-07-07 |
| 10629413 | Adjustment of power and frequency based on three or more states | Bradford J. Lyndaker | 2020-04-21 |
| 10621265 | Systems and methods for tuning an impedance matching network in a step-wise fashion | Arthur M. Howald, Andrew Fong, David Hopkins | 2020-04-14 |
| 10536183 | Dual push between a host computer system and an RF generator | Tony San, Andrew Fong | 2020-01-14 |