Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10791617 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2020-09-29 |
| 10784089 | Temperature and bias control of edge ring | Linying Cui, Rajinder Dhindsa | 2020-09-22 |
| 10763081 | Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device | Linying Cui | 2020-09-01 |
| 10748748 | RF impedance model based fault detection | John C. Valcore, Jr., Nicholas Webb, Peter Muraoka | 2020-08-18 |
| 10685862 | Controlling the RF amplitude of an edge ring of a capacitively coupled plasma process device | — | 2020-06-16 |
| 10685807 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2020-06-16 |
| 10586686 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Sang Ki Nam, Rajinder Dhindsa | 2020-03-10 |
| 10553404 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, Denis M. Koosau | 2020-02-04 |
| 10555412 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2020-02-04 |