Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10791617 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2020-09-29 |
| 10685807 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2020-06-16 |
| 10553404 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, James Rogers, Denis M. Koosau | 2020-02-04 |
| 10555412 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2020-02-04 |