Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10586718 | Cooling base with spiral channels for ESC | Vladimir Knyazik, Shahid Rauf, Stephen Prouty, Roland Smith | 2020-03-10 |
| 10553404 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, James Rogers | 2020-02-04 |