Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy +1 more | 2020-08-18 |
| 10586718 | Cooling base with spiral channels for ESC | Vladimir Knyazik, Shahid Rauf, Stephen Prouty, Denis M. Koosau | 2020-03-10 |