Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2020-12-01 |
| 10854427 | Radio frequency (RF) pulsing impedance tuning with multiplier mode | Katsumasa Kawasaki, Justin Phi, Kartik Ramaswamy, Daisuke Shimizu | 2020-12-01 |
| 10784132 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Chunlei Zhang, Kartik Ramaswamy | 2020-09-22 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Kartik Ramaswamy, Roland Smith +1 more | 2020-08-18 |
| 10546731 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Haitao Wang, Michael G. Chafin, Kartik Ramaswamy, Yue Guo, Valentin N. Todorow +3 more | 2020-01-28 |