Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840062 | Radio frequency filter system for a processing chamber | Andrew Nguyen, Lu Liu, Anilkumar Rayaroth | 2020-11-17 |
| 10546731 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Haitao Wang, Kartik Ramaswamy, Yue Guo, Valentin N. Todorow, Kenny L. Doan +3 more | 2020-01-28 |