Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840062 | Radio frequency filter system for a processing chamber | Andrew Nguyen, Michael G. Chafin, Lu Liu | 2020-11-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840062 | Radio frequency filter system for a processing chamber | Andrew Nguyen, Michael G. Chafin, Lu Liu | 2020-11-17 |