Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2020-12-01 |
| 10847347 | Edge ring assembly for a substrate support in a plasma processing chamber | Anwar Husain, Reyn Tetsuro WAKABAYASHI | 2020-11-24 |
| 10790120 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-09-29 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2020-08-18 |
| 10697061 | Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling | Kartik Shah, Nisha Prakash Holla, Vijaykumar Krithivasan, Anantha K. Subramani | 2020-06-30 |
| 10636629 | Split slit liner door | Reyn Tetsuro WAKABAYASHI | 2020-04-28 |
| 10625277 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2020-04-21 |
| 10607816 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-03-31 |