Issued Patents 2020
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858741 | Plasma resistant multi-layer architecture for high aspect ratio parts | Xiao-Ming He | 2020-12-08 |
| 10847386 | Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-24 |
| 10840112 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-17 |
| 10840113 | Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-17 |
| 10815562 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Biraja P. Kanungo, Martin Jeff Salinas, Jared Ahmad Lee | 2020-10-27 |
| 10818481 | Smart device fabrication via precision patterning | Yikai Chen, Biraja P. Kanungo, Vahid Firouzdor | 2020-10-27 |
| 10796888 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2020-10-06 |
| 10774436 | High purity aluminum top coat on substrate | Sumanth Banda | 2020-09-15 |
| 10774006 | Microwave and induction heat treatment of ceramic coatings | Kaushal Gangakhedkar | 2020-09-15 |
| 10773995 | Low temperature fluoride glasses and glazes | Chengtsin Lee | 2020-09-15 |
| 10766824 | Methods of minimizing particles on wafer from plasma spray coatings | Kaushal Gangakhedkar, Xiao-Ming He | 2020-09-08 |
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiaowei Wu +2 more | 2020-08-25 |
| 10734202 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Biraja P. Kanungo, Tom K. Cho | 2020-08-04 |
| 10730798 | Slurry plasma spray of plasma resistant ceramic coating | Biraja P. Kanungo, Yikai Chen, Vahid Firouzdor | 2020-08-04 |
| 10676819 | Non-line of sight deposition of erbium based plasma resistant ceramic coating | — | 2020-06-09 |
| 10625277 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more | 2020-04-21 |
| 10622194 | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-04-14 |
| 10612121 | Plasma resistant coating with tailorable coefficient of thermal expansion | Chengtsin Lee | 2020-04-07 |
| 10604831 | Plasma spray coating design using phase and stress control | Yikai Chen, Biraja P. Kanungo | 2020-03-31 |
| 10584068 | Rare-earth oxide based chamber material | Biraja P. Kanungo | 2020-03-10 |
| 10577286 | Rare-earth oxide based chamber material | Biraja P. Kanungo | 2020-03-03 |
| 10573497 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, David Fenwick, Guodong Zhan | 2020-02-25 |
| 10570257 | Copolymerized high temperature bonding component | Sumanth Banda | 2020-02-25 |
| 10563297 | Ion assisted deposition top coat of rare-earth oxide | Biraja P. Kanungo, Vahid Firouzdor | 2020-02-18 |
| 10563303 | Metal oxy-flouride films based on oxidation of metal flourides | Xiaowei Wu, David Fenwick, Guodong Zhan, Michael R. Rice | 2020-02-18 |