Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847386 | Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-24 |
| 10840112 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-17 |
| 10840113 | Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-17 |
| 10711350 | Alumina layer formation on aluminum surface to protect aluminum parts | Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2020-07-14 |
| 10622194 | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-04-14 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Kalyanjit Ghosh, Mayur Govind Kulkarni, Gregory Siu, Praket P. Jha +4 more | 2020-04-07 |