Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10724138 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2020-07-28 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Kalyanjit Ghosh, Ren-Guan Duan, Gregory Siu, Praket P. Jha +4 more | 2020-04-07 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou +9 more | 2020-03-24 |