Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636628 | Method for cleaning a process chamber | Kalyanjit Ghosh, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2020-04-28 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Tejas Ulavi, Yusheng Zhou +9 more | 2020-03-24 |