Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Michael R. Rice | 2020-09-29 |
| 10636628 | Method for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2020-04-28 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Yusheng Zhou +9 more | 2020-03-24 |