Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815562 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas | 2020-10-27 |
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Tejas Ulavi, Michael R. Rice | 2020-09-29 |
| 10566205 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Andrew Nguyen | 2020-02-18 |