Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566205 | Abatement and strip process chamber in a load lock configuration | Paul B. Reuter, Andrew Nguyen, Jared Ahmad Lee | 2020-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566205 | Abatement and strip process chamber in a load lock configuration | Paul B. Reuter, Andrew Nguyen, Jared Ahmad Lee | 2020-02-18 |