Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2020-09-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2020-09-29 |