Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787739 | Spatial wafer processing with improved temperature uniformity | Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2020-09-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787739 | Spatial wafer processing with improved temperature uniformity | Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2020-09-29 |