| 10847391 |
Semiconductor device manufacturing platform with single and twinned processing chambers |
Nir Merry, Sushant S. Koshti, Jeffrey C. Hudgens |
2020-11-24 |
| 10847390 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine |
2020-11-24 |
| 10787739 |
Spatial wafer processing with improved temperature uniformity |
Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi |
2020-09-29 |
| 10763134 |
Substrate processing apparatus and methods with factory interface chamber filter purge |
— |
2020-09-01 |
| 10736182 |
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers |
Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Vijay D. Parkhe +1 more |
2020-08-04 |
| 10720348 |
Dual load lock chamber |
— |
2020-07-21 |
| 10665476 |
Substrate processing system, valve assembly, and processing method |
Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Brent Vopat |
2020-05-26 |
| 10615004 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman |
2020-04-07 |
| 10595415 |
Electronic device manufacturing system |
Jeffrey C. Hudgens |
2020-03-17 |
| 10563303 |
Metal oxy-flouride films based on oxidation of metal flourides |
Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun |
2020-02-18 |
| 10553469 |
Sealed substrate carriers and systems and methods for transporting substrates |
Jeffrey C. Hudgens |
2020-02-04 |
