Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665476 | Substrate processing system, valve assembly, and processing method | Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat | 2020-05-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665476 | Substrate processing system, valve assembly, and processing method | Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat | 2020-05-26 |