Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879046 | Substrate support with real time force and film stress control | Wendell Glen Boyd, Jr., Govinda Raj | 2020-12-29 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Vijay D. Parkhe, Michael R. Rice +1 more | 2020-08-04 |