Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847402 | Bond protection around porous plugs | Sumanth Banda | 2020-11-24 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Todd Egan, Gregory L. Kirk, Vijay D. Parkhe, Michael R. Rice +1 more | 2020-08-04 |
| 10679885 | Substrate support assembly with deposited surface features | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2020-06-09 |
| 10654147 | Polishing of electrostatic substrate support geometries | Jim Zhongyi He | 2020-05-19 |
| 10648788 | Substrate distance monitoring | Govinda Raj | 2020-05-12 |