Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879046 | Substrate support with real time force and film stress control | Wendell Glen Boyd, Jr., Matthew J. Busche | 2020-12-29 |
| 10777391 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Goichi Yoshidome, Bopanna Ichettira VASANTHA, Umesh M. Kelkar | 2020-09-15 |
| 10662529 | Cooled gas feed block with baffle and nozzle for HDP-CVD | Hanish Kumar, Lin Zhang, Stanley Wu | 2020-05-26 |
| 10648788 | Substrate distance monitoring | Wendell Glenn Boyd, Jr. | 2020-05-12 |
| 10553473 | Edge ring for a substrate processing chamber | Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA, Simon Yavelberg | 2020-02-04 |