Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10662529 | Cooled gas feed block with baffle and nozzle for HDP-CVD | Govinda Raj, Lin Zhang, Stanley Wu | 2020-05-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10662529 | Cooled gas feed block with baffle and nozzle for HDP-CVD | Govinda Raj, Lin Zhang, Stanley Wu | 2020-05-26 |