Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763154 | Measurement of flatness of a susceptor of a display CVD chamber | Ying Ma, Yixi Tian, Shih-Chang Chen, Jin Sun, Rodolfo V. Perez, JR. | 2020-09-01 |
| 10662529 | Cooled gas feed block with baffle and nozzle for HDP-CVD | Govinda Raj, Hanish Kumar, Lin Zhang | 2020-05-26 |