Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879046 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2020-12-29 |
| 10557202 | Method of processing a substrate support assembly | Vijay D. Parkhe, Senh Thach | 2020-02-11 |