Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872749 | Textured skin for chamber components | Gangadhar Sheelavant, Cariappa Baduvamanda, Kaushik Vaidya | 2020-12-22 |
| 10777391 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Govinda Raj, Goichi Yoshidome, Umesh M. Kelkar | 2020-09-15 |
| 10553473 | Edge ring for a substrate processing chamber | Govinda Raj, Kadthala Ramaya Narendrnath, Simon Yavelberg | 2020-02-04 |