Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10744618 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Periya Gopalan, Christopher R. Mahon | 2020-08-18 |
| 10656100 | Surface acoustic wave sensors in semiconductor processing equipment | Ramesh Gopalan, Zubin Huang | 2020-05-19 |
| 10553473 | Edge ring for a substrate processing chamber | Govinda Raj, Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA | 2020-02-04 |