Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777391 | 3D printed chamber components configured for lower film stress and lower operating temperature | Govinda Raj, Goichi Yoshidome, Bopanna Ichettira VASANTHA, Umesh M. Kelkar | 2020-09-15 |
| 10636690 | Laminated top plate of a workpiece carrier in micromechanical and semiconductor processing | — | 2020-04-28 |
| 10553473 | Edge ring for a substrate processing chamber | Govinda Raj, Bopanna Ichettira VASANTHA, Simon Yavelberg | 2020-02-04 |