Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777391 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Govinda Raj, Bopanna Ichettira VASANTHA, Umesh M. Kelkar | 2020-09-15 |
| 10697057 | Collimator for use in a physical vapor deposition chamber | Keith A. Miller, Hamid Tavassoli, Andrew John Tomko | 2020-06-30 |
| 10563304 | Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers | Xiangjin Xie, Adolph Miller Allen, Xianmin Tang | 2020-02-18 |