Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815561 | Method and apparatus for asymmetric selective physical vapor deposition | Joung Joo Lee, Bencherki Mebarki, Keith A. Miller, Sree Rangasai V. Kesapragada, Sudarsan Srinivasan | 2020-10-27 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10734235 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Thanh X. Nguyen, Zhiyong Wang, Jianxin Lei | 2020-08-04 |
| 10718049 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Rongjun Wang, Zhendong Liu, Xinyu Fu | 2020-07-21 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn +2 more | 2020-07-14 |
| 10707122 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2020-07-07 |
| 10636655 | Methods for asymmetric deposition of metal on high aspect ratio nanostructures | Ben-Li Sheu, Bencherki Mebarki, Joung Joo Lee, Ismail Emesh, Roey Shaviv | 2020-04-28 |
| 10563304 | Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers | Xiangjin Xie, Adolph Miller Allen, Goichi Yoshidome | 2020-02-18 |