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High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process |
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Process kit shield for improved particle reduction |
Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang |
2020-07-21 |
| 10704142 |
Quick disconnect resistance temperature detector assembly for rotating pedestal |
Muhannad Mustafa, Mario D. Sanchez, Yu Chang, William Kuang, Vinod Konda Purathe +1 more |
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| 10704147 |
Process kit design for in-chamber heater and wafer rotating mechanism |
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2020-07-07 |
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Methods and apparatus for reducing sputtering of a grounded shield in a process chamber |
Alan A. Ritchie, John C. Forster |
2020-06-23 |
| 10571069 |
Gimbal assembly for heater pedestal |
Muhannad Mustafa |
2020-02-25 |
