Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Rongjun Wang, Xianmin Tang +8 more | 2020-09-01 |
| 10718049 | Process kit shield for improved particle reduction | Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang | 2020-07-21 |
| 10704142 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Muhannad Mustafa, Mario D. Sanchez, Yu Chang, William Kuang, Vinod Konda Purathe +1 more | 2020-07-07 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhannad Mustafa, Hamid Tavassoli, Steven V. Sansoni, Cheng-Hsiung Tsai, Vikash Banthia | 2020-07-07 |
| 10692706 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | Alan A. Ritchie, John C. Forster | 2020-06-23 |
| 10571069 | Gimbal assembly for heater pedestal | Muhannad Mustafa | 2020-02-25 |