Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704142 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Muhammad M. Rasheed, Mario D. Sanchez, Yu Chang, William Kuang, Vinod Konda Purathe +1 more | 2020-07-07 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhammad M. Rasheed, Hamid Tavassoli, Steven V. Sansoni, Cheng-Hsiung Tsai, Vikash Banthia | 2020-07-07 |
| 10571069 | Gimbal assembly for heater pedestal | Muhammad M. Rasheed | 2020-02-25 |