Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D893441 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2020-08-18 |
| D891382 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, David T. Or | 2020-07-28 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhammad M. Rasheed, Muhannad Mustafa, Hamid Tavassoli, Cheng-Hsiung Tsai, Vikash Banthia | 2020-07-07 |