Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861742 | Interconnect structure having an etch stop layer over conductive lines | Chung-Ju Lee, Shau-Lin Shue, Tien-I Bao | 2020-12-08 |
| 10851453 | Methods and apparatus for shutter disk assembly detection | Ananthkrishna Jupudi, Eiji Asahina, Sarath Babu | 2020-12-01 |
| 10763086 | High conductance process kit | Bonnie T. Chia | 2020-09-01 |
| D893441 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2020-08-18 |
| D891382 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2020-07-28 |
| 10711348 | Apparatus to improve substrate temperature uniformity | Youqun Dong, Manjunatha Koppa | 2020-07-14 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhammad M. Rasheed, Muhannad Mustafa, Hamid Tavassoli, Steven V. Sansoni, Vikash Banthia | 2020-07-07 |
| D888903 | Deposition ring for physical vapor deposition chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2020-06-30 |
| 10665467 | Spacer etching process for integrated circuit design | Ru-Gun Liu, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee, Jyu-Horng Shieh +6 more | 2020-05-26 |
| 10593521 | Substrate support for plasma etch operations | Larry Frazier, John C. Forster, Mei Po (Mabel) Yeung, Michael S. Jackson | 2020-03-17 |