Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10711348 | Apparatus to improve substrate temperature uniformity | Cheng-Hsiung Tsai, Manjunatha Koppa | 2020-07-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10711348 | Apparatus to improve substrate temperature uniformity | Cheng-Hsiung Tsai, Manjunatha Koppa | 2020-07-14 |