Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D893441 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni | 2020-08-18 |
| D891382 | Process shield for a substrate processing chamber | Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2020-07-28 |
| 10711348 | Apparatus to improve substrate temperature uniformity | Cheng-Hsiung Tsai, Youqun Dong | 2020-07-14 |
| 10704142 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Yu Chang, William Kuang +1 more | 2020-07-07 |