SS

Shau-Lin Shue

TSMC: 14 patents #112 of 3,471Top 4%
Overall (2020): #4,250 of 565,922Top 1%
14
Patents 2020

Issued Patents 2020

Showing 1–14 of 14 patents

Patent #TitleCo-InventorsDate
10879115 Semiconductor device and forming method thereof Ming-Han Lee, Shih-Kang Fu, Meng-Pei Lu 2020-12-29
10867913 Method and apparatus for forming self-aligned via with selectively deposited etching stop layer Yung-Hsu Wu, Hai-Ching Chen, Jung-Hsun Tsai, Tien-I Bao 2020-12-15
10867850 Selective deposition method for forming semiconductor structure Cheng-Chin Lee, Shao-Kuan Lee, Hsin-Yen Huang, Hai-Ching Chen 2020-12-15
10861742 Interconnect structure having an etch stop layer over conductive lines Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2020-12-08
10818509 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2020-10-27
10784160 Semiconductor device having voids and method of forming same Yung-Hsu Wu, Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao 2020-09-22
10763211 Semiconductor device and manufacturing method thereof Ming-Han Lee 2020-09-01
10714424 Method of forming metal interconnection Shin-Yi Yang, Ming-Han Lee, Tz-Jun Kuo 2020-07-14
10676351 Nano-electromechanical system (NEMS) device structure and method for forming the same Hsin-Ping Chen, Carlos H. Diaz, Ken-Ichi Goto, Tai-I Yang 2020-06-09
10665467 Spacer etching process for integrated circuit design Ru-Gun Liu, Cheng-Hsiung Tsai, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee +6 more 2020-05-26
10651279 Semiconductor interconnect structure having graphene-capped metal interconnects Shin-Yi Yang, Ching-Fu Yeh, Ming-Han Lee 2020-05-12
10622453 Vertical MOS transistor Tai-I Yang, Yung-Chih Wang, Shin-Yi Yang, Chih Wei Lu, Hsin-Ping Chen 2020-04-14
10534273 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Li-Lin Su, Yung-Hsu Wu 2020-01-14
10535559 Semiconductor interconnect structure having a graphene barrier layer Shin-Yi Yang, Ming-Han Lee 2020-01-14