Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593521 | Substrate support for plasma etch operations | Cheng-Hsiung Tsai, John C. Forster, Mei Po (Mabel) Yeung, Michael S. Jackson | 2020-03-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593521 | Substrate support for plasma etch operations | Cheng-Hsiung Tsai, John C. Forster, Mei Po (Mabel) Yeung, Michael S. Jackson | 2020-03-17 |