Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879042 | Symmetric plasma source to generate pie shaped treatment | Anantha K. Subramani, Farzad Houshmand, Philip Allan Kraus, Abhishek Chowdhury, Kallol Bera | 2020-12-29 |
| 10763085 | Shaped electrodes for improved plasma exposure from vertical plasma source | Kallol Bera, Dmitry A. Dzilno, Anantha K. Subramani, Tsutomu Tanaka | 2020-09-01 |
| 10692706 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | Alan A. Ritchie, Muhammad M. Rasheed | 2020-06-23 |
| 10593521 | Substrate support for plasma etch operations | Larry Frazier, Cheng-Hsiung Tsai, Mei Po (Mabel) Yeung, Michael S. Jackson | 2020-03-17 |