Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879042 | Symmetric plasma source to generate pie shaped treatment | Farzad Houshmand, Philip Allan Kraus, Abhishek Chowdhury, John C. Forster, Kallol Bera | 2020-12-29 |
| 10763085 | Shaped electrodes for improved plasma exposure from vertical plasma source | Kallol Bera, Dmitry A. Dzilno, John C. Forster, Tsutomu Tanaka | 2020-09-01 |
| 10763143 | Processing tool having a monitoring device | Shimin Mao, Simon Huang, Ashish Goel, Philip Allan Kraus | 2020-09-01 |
| 10697061 | Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling | Kartik Shah, Nisha Prakash Holla, Vijaykumar Krithivasan, Hamid Noorbakhsh | 2020-06-30 |
| 10597785 | Single oxide metal deposition chamber | Praburam Gopalraja, Tza-Jing Gung, Hari Ponnekanti, Philip Allan Kraus | 2020-03-24 |
| 10577689 | Sputtering showerhead | Tza-Jing Gung, Praburam Gopalraja, Hari Ponnekanti | 2020-03-03 |
| 10546973 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Daniel Lee Diehl, Vivek Agrawal | 2020-01-28 |