Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854432 | Rotary plasma electrical feedthrough | — | 2020-12-01 |
| 10734265 | Semiconductor process equipment | Karthik Janakiraman, Juan Carlos Rocha, Mukund Srinivasan | 2020-08-04 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10597785 | Single oxide metal deposition chamber | Anantha K. Subramani, Praburam Gopalraja, Tza-Jing Gung, Philip Allan Kraus | 2020-03-24 |
| 10577689 | Sputtering showerhead | Anantha K. Subramani, Tza-Jing Gung, Praburam Gopalraja | 2020-03-03 |