Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734232 | Deposition of metal silicide layers on substrates and chamber components | Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2020-08-04 |
| 10679830 | Cleaning process for removing boron-carbon residuals in processing chamber at high temperature | Feng Bi, Kwangduk Douglas Lee, Paul Connors | 2020-06-09 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Karthik Thimmavajjula Narasimha +12 more | 2020-04-28 |