Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10774423 | Tunable ground planes in plasma chambers | Karthik Janakiraman, Thomas Nowak, Juan Carlos Rocha-Alvarez, Mark Fodor, Amit Kumar BANSAL +4 more | 2020-09-15 |
| 10720349 | Temperature measurement in multi-zone heater | Bozhi Yang, Jianhua Zhou, Sanjeev Baluja, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2020-07-21 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2020-04-28 |
| 10570517 | Apparatus and method for UV treatment, chemical treatment, and deposition | Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Scott A. Hendrickson, Thomas Nowak | 2020-02-25 |
| 10527407 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Mehdi Vaez-Iravani, Jeongmin Lee +1 more | 2020-01-07 |