Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10774423 | Tunable ground planes in plasma chambers | Thomas Nowak, Juan Carlos Rocha-Alvarez, Mark Fodor, Dale R. Du Bois, Amit Kumar BANSAL +4 more | 2020-09-15 |
| 10734265 | Semiconductor process equipment | Hari Ponnekanti, Juan Carlos Rocha, Mukund Srinivasan | 2020-08-04 |
| 10711347 | Micro-volume deposition chamber | Dale R. DuBois, Kien N. Chuc | 2020-07-14 |
| 10559465 | Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide | Rui Cheng, Yi Yang, Yihong Chen, Abhijit Basu Mallick | 2020-02-11 |