Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811303 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2020-10-20 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Pramit Manna, Yihong Chen, Ziqing Duan, Shishi Jiang | 2020-09-22 |
| 10699903 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Shishi Jiang, Abhijit Basu Mallick | 2020-06-30 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Pramit Manna, Abhijit Basu Mallick, Shishi Jiang, Yong Wu +2 more | 2020-04-28 |
| 10626495 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Abhijit Basu Mallick, Pramit Manna | 2020-04-21 |
| 10615050 | Methods for gapfill in high aspect ratio structures | Abhijit Basu Mallick, Pramit Manna, Yihong Chen | 2020-04-07 |
| 10559465 | Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide | Yi Yang, Yihong Chen, Karthik Janakiraman, Abhijit Basu Mallick | 2020-02-11 |
| 10529568 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2020-01-07 |