Issued Patents 2020
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854511 | Methods of lowering wordline resistance | Yihong Chen, Yong Wu, Chia Cheng Chin, Xinliang Lu, Srinivas Gandikota +1 more | 2020-12-01 |
| 10851454 | Metal deposition methods | Yong Wu, Srinivas Gandikota | 2020-12-01 |
| 10840186 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Ziqing Duan, Praburam Gopalraja | 2020-11-17 |
| 10840088 | Low temperature high-quality dielectric films | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Pramit Manna | 2020-11-17 |
| 10818490 | Controlled growth of thin silicon oxide film at low temperature | Shishi Jiang, Kurtis Leschkies, Pramit Manna, Steven Verhaverbeke | 2020-10-27 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan +1 more | 2020-10-20 |
| 10790139 | Deposition of silicon and oxygen-containing films without an oxidizer | Brian Saxton Underwood | 2020-09-29 |
| 10790141 | Surface-selective atomic layer deposition using hydrosilylation passivation | Kelvin Chan, Yihong Chen | 2020-09-29 |
| 10784107 | Methods of forming tungsten pillars | Pramit Manna, Yihong Chen, Ziqing Duan, Rui Cheng, Shishi Jiang | 2020-09-22 |
| 10770349 | Critical dimension control for self-aligned contact patterning | Ziqing Duan | 2020-09-08 |
| 10745282 | Diamond-like carbon film | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Pramit Manna | 2020-08-18 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Srinivas Gandikota, Pramit Manna | 2020-08-11 |
| 10714339 | Selectively deposited parylene masks and methods related thereto | Fei Wang, Miaojun Wang, Pramit Manna, Shishi Jiang, Robert Jan Visser | 2020-07-14 |
| 10699952 | Deposition and treatment of films for patterning | Atashi Basu, Ziqing Duan, Srinivas Gandikota | 2020-06-30 |
| 10699903 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Shishi Jiang, Rui Cheng | 2020-06-30 |
| 10643841 | Surface modification to improve amorphous silicon gapfill | Pramit Manna, Shishi Jiang | 2020-05-05 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Rui Cheng, Pramit Manna, Shishi Jiang, Yong Wu +2 more | 2020-04-28 |
| 10636659 | Selective deposition for simplified process flow of pillar formation | Yihong Chen, Ziqing Duan, Yong Wu, Srinivas Gandikota | 2020-04-28 |
| 10626495 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Rui Cheng, Pramit Manna | 2020-04-21 |
| 10622251 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Kelvin Chan | 2020-04-14 |
| 10622221 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Srinivas Gandikota, Susmit Singha Roy, Yingli Rao, Regina Freed +1 more | 2020-04-14 |
| 10615050 | Methods for gapfill in high aspect ratio structures | Rui Cheng, Pramit Manna, Yihong Chen | 2020-04-07 |
| 10607841 | Silicide films through selective deposition | Swaminathan Srinivasan, Nicolas L. Breil | 2020-03-31 |
| 10600684 | Ultra-thin diffusion barriers | Susmit Singha Roy, Yihong Chen, Srinivas Gandikota | 2020-03-24 |
| 10580642 | Two-step process for silicon gapfill | Pramit Manna, Shishi Jiang | 2020-03-03 |