Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840186 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Ziqing Duan, Abhijit Basu Mallick | 2020-11-17 |
| 10597785 | Single oxide metal deposition chamber | Anantha K. Subramani, Tza-Jing Gung, Hari Ponnekanti, Philip Allan Kraus | 2020-03-24 |
| 10577689 | Sputtering showerhead | Anantha K. Subramani, Tza-Jing Gung, Hari Ponnekanti | 2020-03-03 |