Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790180 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal, Vijay D. Parkhe +2 more | 2020-09-29 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10707116 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Jinrui GUO, Praket P. Jha, Jung Chan Lee +1 more | 2020-07-07 |
| 10597785 | Single oxide metal deposition chamber | Anantha K. Subramani, Praburam Gopalraja, Hari Ponnekanti, Philip Allan Kraus | 2020-03-24 |
| 10595477 | Oxide with higher utilization and lower cost | Lei Guo, Praket P. Jha, Milind Gadre, Deenesh Padhi | 2020-03-24 |
| 10577689 | Sputtering showerhead | Anantha K. Subramani, Praburam Gopalraja, Hari Ponnekanti | 2020-03-03 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Vladimir Knyazik, Kyle Tantiwong, Dan Marohl, Valentin N. Todorow +1 more | 2020-02-04 |
| 10541159 | Processing chamber with irradiance curing lens | Orlando Trejo, Ramprakash Sankarakrishnan | 2020-01-21 |